Showa Denko America

Electrification Dissipating Material

Espacer is an aqueous solution without any organic solvent. It’s a weak acidic solution, which is applicable for both type of resist.

A thin film of Espacer is highly conductive, therefore it solves problems related to positional errors during electron-beam (EB) lithography processes.

Grade Selection

  Non Chemical Amplified Chemical Amplified
Positive
Resist
Positive
Resist
Negative
Resist
Positive
Resist
Negative
Resist
Negative
Resist
Espacer ZEP520 PMMA FOC-1X FEP-71 SAL601 NEB22
300Z
300HX02
300AX01