Espacer™
Electrification Dissipating Material
Espacer is an aqueous solution without any organic solvent. It’s a weak acidic solution, which is applicable for both type of resist.
A thin film of Espacer is highly conductive, therefore it solves problems related to positional errors during electron-beam (EB) lithography processes.
Grade Selection
Non Chemical Amplified | Chemical Amplified | |||||
Positive Resist |
Positive Resist |
Negative Resist |
Positive Resist |
Negative Resist |
Negative Resist |
|
Espacer | ZEP520 | PMMA | FOC-1X | FEP-71 | SAL601 | NEB22 |
300Z | ✓ | ✓ | ||||
300HX02 | ✓ | |||||
300AX01 | ✓ | ✓ | ✓ |